Critical Voltage for Atom Migration in Ballistic Copper Nanojunctions and Its Implications to Interconnect Technology for Very Large Scale Integrated Circuits
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概要
- 論文の詳細を見る
We investigated the critical voltage for electromigration (EM) in atomic-scale Cu nanojunctions by using EM spectroscopy. The critical voltage was determined to be 0.35 V from the peak of the obtained EM spectrum, which is close to the atom diffusion potential for clean Cu surfaces. It was also demonstrated that ballistic Cu nanojunctions can support current densities on the order of 10 GA/cm2, as long as the junctions are biased below the critical voltage. The results suggest that both high current densities and high EM reliabilities can be achieved when the dimension of the metal interconnects is reduced to several tens of atoms.
- 2010-11-25
著者
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HIRAKAWA Kazuhiko
Institute of Industrial Science,University of Tokyo
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Sakata Shuichi
Institute Of Industrial Science And Institute For Nano Quantum Information Electronics University Of
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Sakata Shuichi
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Hirakawa Kazuhiko
Univ. Tokyo Tokyo Jpn
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Hirakawa Kazuhiko
Institute Of Industrial Science And Institute For Nano Quantum Information Electronics University Of
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YOSHIDA Kenji
Institute of Industrial Science and Institute for Nano Quantum Information Electronics, University o
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UMENO Akinori
Institute of Industrial Science and Institute for Nano Quantum Information Electronics, University o
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Umeno Akinori
Institute Of Industrial Science And Institute For Nano Quantum Information Electronics University Of
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Yoshida Kenji
Institute Of Industrial Science And Institute For Nano Quantum Information Electronics University Of
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Hirakawa Kazuhiko
Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Yoshida Kenji
Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Sakata Shuichi
Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Umeno Akinori
Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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