KATO Yoshitake | ULSI Device Development Laboratory, NEC Corporation
スポンサーリンク
概要
関連著者
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ARITA Koji
ULSI Device Development Laboratory, NEC Corporation
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SONE Shuji
ULSI Device Development Laboratory, NEC Corporation
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KATO Yoshitake
ULSI Device Development Laboratory, NEC Corporation
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Yamamichi Shintaro
Fundamental Research Laboratories Nec Corporation
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Arita Koji
ULSI Device Development Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Kato Yoshitake
ULSI Device Development Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Sone Shuji
ULSI Device Development Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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YABUTA Hisato
Department of Quantum Matter, ADSM, Hiroshima University
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Yoshida M
Functional Materials Research Laboratories Nec Corporation
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YAMAMICHI Shintaro
Functional Materials Research Laboratories, NEC Corporation
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YABUTA Hisato
Fundamental Research Laboratories, NEC Corporation
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Yabuta Hisato
Department Of Quantum Matter Adsm Hiroshima University
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Yoshida M
Yoshida Semiconductor Lab. Fukuoka Jpn
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YOSHIDA Masayuki
Kyushu Institute of Design
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Yoshida Masayoshi
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Yamamichi Shintaro
Functional Materials Research Laboratories Nec Corporation
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Yoshida M
National Institute Of Advanced Industrial And Science Technology (aist)
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Sone S
Ulsi Device Development Laboratory Nec Corporation
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Arita K
Waseda Univ. Tokyo Jpn
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Kato Y
Ulsi Device Development Laboratory Nec Corporation:(present Address)advanced Process R&d And Str
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Akahane Reiko
Fundamental Research Laboratories Nec Corporation:(present Address)functional Materials Laboratories
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Yoshida Masaji
Fundamental Research Laboratories Nec Corporation
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Yashiro M
Univ. Tokyo Tokyo
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Arita K
Ulsi Device Development Laboratory Nec Corporation
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AKAHANE Reiko
Fundamental Research Laboratories, NEC Corporation
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YAMAMICHI Shintaro
Fundamental Research Laboratories, NEC Corporation
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YOSHIDA Masaji
Fundamental Research Laboratories, NEC Corporation
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Matsuki T
Ulsi Device Development Laboratory Nec Corporation
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IIZUKA Toshihiro
ULSI Device Development Laboratory, NEC Corporation
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YAMAMOTO Ichiro
ULSI Device Development Laboratory, NEC Corporation
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YAMAGUCHI Hiromu
ULSI Device Development Laboratory, NEC Corporation
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MATSUKI Takeo
ULSI Device Development Laboratory, NEC Corporation
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YABUTA Hisato
Functional Materials Research Laboratories, NEC Corporation
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MIYASAKA Yoichi
Functional Materials Research Laboratories, NEC Corporation
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Yamaguchi H
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Yamaguchi H
Ntt Basic Research Laboratories
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Matsuki Takeo
Ulsi Device Development Laboratory Nec Corporation
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Iizuka Toshihiro
Ulsi Device Development Laboratory Nec Corporation
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Yamamoto Ichiro
Ulsi Device Development Laboratories Nec Corporation
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Yamamoto Ichiro
Ulsi Device Development Laboratory Nec Corporation
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YAMAGUCHI Hiromu
ULSI Device Development Laboratories, NEC Corporation
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Yabuta Hisato
Fundamental Research Laboratories, NEC Corporation, 4-1-1 Miyazaki, Miyamae-ku, Kawasaki, Kanagawa 216-8555, Japan
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Yamamichi Shintaro
Fundamental Research Laboratories, NEC Corporation, 4-1-1 Miyazaki, Miyamae-ku, Kawasaki, Kanagawa 216-8555, Japan
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Iizuka Toshihiro
ULSI Device Development Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229, Japan
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Akahane Reiko
Fundamental Research Laboratories, NEC Corporation, 4-1-1 Miyazaki, Miyamae-ku, Kawasaki, Kanagawa 216-8555, Japan
著作論文
- Low Temperature Recovery of Ru(Ba, Sr)TiO_3/Ru Capacitors Degraded by Forming Gas Annealing
- Electrical Properties of (Ba,Sr)TiO_3 Films on Ru Bottom Electrodes Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition at Extremely Low Temperature and Rapid Thermal Annealing
- Electrical Properties of (Ba,Sr)TiO_3 Films on Ru Bottom Electrodes Prepared by ECR Plasma CVD at Extremely Low Temperature and RTA
- Electrical Properties of (Ba, Sr)TiO3 Films on Ru Bottom Electrodes Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition at Extremely Low Temperature and Rapid Thermal Annealing