ONO Tetsuo | Kasado Works, Hitachi, Ltd
スポンサーリンク
概要
関連著者
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ONO Tetsuo
Kasado Works, Hitachi, Ltd
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Ono T
Osaka Univ. Osaka Jpn
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MIZUTANI Tatsumi
Kasado Works, Hitachi, Ltd.
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Kure Tokuo
Central Research Laboratory Hitachi Ltd
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ONO Tetsuo
Central Research Laboratory, Hitachi, Ltd.
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Goto Yasushi
Central Research Laboratory Hitachi Ltd.
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Ono Tetsuo
Central Research Laboratory Hitachi Ltd.
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Kure Tokuo
Central Research Laboratory, Hitachi, Ltd.
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Kure T
Hitachi Ltd. Tokyo Jpn
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Yamamoto S
Univ. Tsukuba Ibaraki Jpn
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Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
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GOTO Yasushi
Central Research Laboratory, Hitachi, Ltd.
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YAMAMOTO Seiji
Central Research Laboratory, Hitachi Ltd.
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Kure Tokuo
Hitachi Ulsi Engineering Corp.
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OCHIAI Isao
Department of Physics,Faculty of Science,The University of Tokyo
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ITABASHI Naoshi
Central Research Laboratory, Hitachi, Ltd.
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OCHIAI Isao
Central Research Laboratory, Hitachi, Ltd.
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Yamamoto Seiji
Central Research Laboratory Hitachi Ltd.
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Itabashi N
Plasma Technology Laboratory Association Of Super-advanced Electronics Technologies(aset)
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Ochiai Isao
Central Research Laboratory Hitachi Ltd.
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Goto Y
Central Research Laboratory Hitachi Ltd.
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Mochiji K
Joint Res. Center For Atom Technol. Angstrom Technol. Partnership(jrcat‐atp) Ibaraki Jpn
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Hamasaki Ryoji
Kasado Works Hitachi Ltd.
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Itabashi Naoshi
Central Research Laboratory Hitachi Ltd.
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Ochiai I
Central Research Laboratory Hitachi Ltd.
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MOCHIJI Kozo
Central Research Laboratory, Hitachi Ltd.
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Miyazaki Hiroshi
Kasado Works, Hitachi, Ltd.
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MOCHIJI Kozou
Central Research Laboratory, Hitachi, Ltd.
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Mochiji Kozo
Central Research Laboratory Hitachi Ltd.
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Ono Tomio
Research And Development Center Toshiba Corporation
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MIZUTANI Tatsumi
Central Research Laboratory, Hitachi, Ltd
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Kondoh You
Research And Development Center Toshiba Corporation
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Mizutani Tatsumi
Central Reseach Laboratory Hitachi Ltd.
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Miyazaki H
Osaka Univ. Osaka Jpn
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Miyazaki Hiroshi
Kasado Works Hitachi Ltd.
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Kure Tokuo
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japan
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Ono Tetsuo
Kasado Works, Hitachi, Ltd., Kudamatsu, Yamaguchi 744, Japan
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Mizutani Tatsumi
Kasado Works, Hitachi, Ltd., Kudamatsu, Yamaguchi 744, Japan
著作論文
- Highly Anisotropic Etching of Polysilicon by Time-Modulation Bias
- Highly Selective Etching of Poly-Si by Time Modulation Bias
- Positive Charge Generation at a SiO_2/Si Interface due to Bombardment with Metastable Atoms
- Thermal and Ion-Induced Reactions on a Chlorine-Adsorbed GaAs (100) Surface Studied by Metastable-Atom De-excitation Electron Spectroscopy
- Mechanism for CF Polymer Film Deposition through Deep SiO_2 Holes in Electron Cyclotron Resonance Plasma
- Mechanism of CF Polymer Film Deposition through High-Aspect-Ratio SiO_2 Holes
- Bimorph Type Actuators Using Lead Zinc Niobate-Based Ceramics : Piezoelectrics
- Highly Anisotropic Etching of Polysilicon by Time-Modulation Bias