HEYA Akira | JAIST(Japan Advanced Institute of Science and Technology)

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概要

• 同名の論文著者
• JAIST(Japan Advanced Institute of Science and Technology)の論文著者

関連著者

• HEYA Akira

  Industrial Research Institute of Ishikawa (IRII)

• HEYA Akira

  JAIST(Japan Advanced Institute of Science and Technology)

• Matsumura Hideki

  Japan Advanced Inst. Sci. And Technol. (jaist) Ishikawa Jpn

• MASUDA Atsushi

  Japan Advanced Institute of Science and Technology

• Nakamura T

  National Defense Acad. Kanagawa Jpn

• NIKI Toshikazu

  Japan Science and Technology Agency (JST)

• YONEZAWA Yasuto

  Industrial Research Institute of Ishikawa (IRII)

• MINAMIKAWA Toshiharu

  Industrial Research Institute of Ishikawa (IRII)

• MUROI Susumu

  Ishikawa Seisakusho, Ltd.

• UMEMOTO Hironobu

  Japan Advanced Institute of Science and Technology (JAIST)

• IZUMI Akira

  Japan Advanced Institute of Science and Technology (JAIST)

• Niki Toshikazu

  Ishikawa Seisakusho Ltd.

• TAKANO Masahiro

  Industrial Research Institute of Ishikawa (IRII)

• MINAMI Shigehira

  Ishikawa Seisakusho, Ltd.

• Matsumura Hideki

  School Of Materials Science Japan Advanced Institute Of Science And Technology (jaist)

• Izumi A

  School Of Materials Science Japan Advanced Institute Of Science And Technology (jaist)

• Masuda A

  Japan Advanced Institute Of Science And Technology

• MATSUMURA Hideki

  JAIST(Japan Advanced Institute of Science and Technology)

• Minamikawa Toshiharu

  Industrial Research Institute Of Ishikawa

• Nakamura T

  Department Of Earth And Ocean Sciences National Defense Academy

• Matsumura Hideki

  Jaist (japan Advanced Institute Of Science And Technology)

• Muroi Susumu

  Ishikawa Seisakusho Ltd.

• Miura T

  Environmental Health Sciences Division National Lnstitute For Environmental Studies:(present Address

• Yonezawa Y

  Industrial Research Institute Of Ishikawa

• Yonezawa Yasuto

  Industrial Research Institute Of Ishikawa

• 高野 昌宏

  石川県工業試験場機械金属部

• OSONO Tetsuo

  Japan Advanced Institute of Science and Technology (JAIST)

• DOGUCHI Yoshiteru

  Industrial Research Institute of Ishikawa (IRII)

• IKARI Tokuo

  Kuraray Co., Ltd.

• IZUMI Akira

  JAIST(Japan Advanced Institute of Science and Technology)

• MASUDA Atsushi

  JAIST(Japan Advanced Institute of Science and Technology)

• Matsumura H

  Jaist Ishikawa

• HE An-Qiang

  JAIST(Japan Advanced Institute of Science and Technology)

• OTSUKA Nobuo

  JAIST(Japan Advanced Institute of Science and Technology)

• He A‐q

  Japan Advanced Inst. Sci. And Technol. (jaist) Kanagawa Jpn

• Izumi Akira

  Jaist (japan Advanced Institute Of Science And Technology)

• Otsuka N

  Japan Advanced Institute Of Science And Technology(jaist)

• Otsuka Nobuo

  Department Of Metallurgy Tokyo Institute Of Technology

• Minami Shigehira

  Ishikawa Seisakusho Ltd.

• Matsumura Hideki

  School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)

• Takano Masahiro

  Industrial Research Institute of Ishikawa

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著作論文

• Preparation of Low-Stress SiN_x Films by Catalytic Chemical Vapor Deposition at Low Temperatures
• Improvement of Deposition Rate by Sandblasting of Tungsten Wire in Catalytic Chemical Vapor Deposition
• Moisture-Resistive Properties of SiN_x Films Prepared by Catalytic Chemical Vapor Deposition below 100℃ for Flexible Organic Light-Emitting Diode Displays
• Effect of Atomic Hydrogen on Preparation of Highly Moisture-Resistive SiN_x Films at Low Substrate Temperatures
• Highly Moisture-Resistive SiN_x Films Prepared by Catalytic Chemical Vapor Deposition
• Control of Polycrystalline Silicon Structure by the Two-Step Deposition Method
• Microstructure of Polysilicon Films Grown by Catalytic Chemical Vapor Deposition Method

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