OSONO Tetsuo | Japan Advanced Institute of Science and Technology (JAIST)
スポンサーリンク
概要
関連著者
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Matsumura Hideki
Japan Advanced Inst. Sci. And Technol. (jaist) Ishikawa Jpn
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MASUDA Atsushi
Japan Advanced Institute of Science and Technology
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TAKANO Masahiro
Industrial Research Institute of Ishikawa (IRII)
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NIKI Toshikazu
Japan Science and Technology Agency (JST)
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HEYA Akira
Industrial Research Institute of Ishikawa (IRII)
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OSONO Tetsuo
Japan Advanced Institute of Science and Technology (JAIST)
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UMEMOTO Hironobu
Japan Advanced Institute of Science and Technology (JAIST)
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Nakamura T
National Defense Acad. Kanagawa Jpn
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YONEZAWA Yasuto
Industrial Research Institute of Ishikawa (IRII)
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MINAMIKAWA Toshiharu
Industrial Research Institute of Ishikawa (IRII)
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MUROI Susumu
Ishikawa Seisakusho, Ltd.
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MINAMI Shigehira
Ishikawa Seisakusho, Ltd.
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HEYA Akira
JAIST(Japan Advanced Institute of Science and Technology)
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Minamikawa Toshiharu
Industrial Research Institute Of Ishikawa
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Muroi Susumu
Ishikawa Seisakusho Ltd.
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Niki Toshikazu
Ishikawa Seisakusho Ltd.
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Yonezawa Yasuto
Industrial Research Institute Of Ishikawa
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Minami Shigehira
Ishikawa Seisakusho Ltd.
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Masuda Atsushi
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Tatsunokuchi, Nomi, Ishikawa 923-1292, Japan
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Umemoto Hironobu
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Tatsunokuchi, Nomi, Ishikawa 923-1292, Japan
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Osono Tetsuo
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Tatsunokuchi, Nomi, Ishikawa 923-1292, Japan
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Minamikawa Toshiharu
Industrial Research Institute of Ishikawa (IRII), 2-1 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Yonezawa Yasuto
Industrial Research Institute of Ishikawa (IRII), 2-1 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Heya Akira
Industrial Research Institute of Ishikawa (IRII), 2-1 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Takano Masahiro
Industrial Research Institute of Ishikawa
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Minami Shigehira
Ishikawa Seisakusho, Ltd., 200 Fukudome, Matto, Ishikawa 924-0051, Japan
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Matsumura Hideki
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Tatsunokuchi, Nomi, Ishikawa 923-1292, Japan
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Niki Toshikazu
Japan Science and Technology Agency (JST), 2-13 Asahidai, Tatsunokuchi, Nomi, Ishikawa 923-1211, Japan
著作論文
- Preparation of Low-Stress SiN_x Films by Catalytic Chemical Vapor Deposition at Low Temperatures
- Preparation of Low-Stress SiNx Films by Catalytic Chemical Vapor Deposition at Low Temperatures