Takei Satoshi | Nissan Chemical Ind. Ltd. Toyama Jpn
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概要
関連著者
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Takei Satoshi
Nissan Chemical Ind. Ltd. Toyama Jpn
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Takei Satoshi
Nissan Chemical Industries Ltd.
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Shinjo Tetsuya
Nissan Chemical Industries Ltd. Toyama Jpn
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TAGAWA Seiichi
The Institute of Scientific and Industrial Research, Osaka University
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関 修平
大阪大学産業科学研究所
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research, Osaka University
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TAKEI Satoshi
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
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SHINJO Tetsuya
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
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SAKAIDA Yasushi
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
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Tagawa S
The Inst. Of Scientific And Industrial Res. Osaka Univ.
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Tagawa Seiichi
The Institute Of Scientific And Industrial Research
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HIJIKATA Hayato
The Institute of Scientific and Industrial Research, Osaka University
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Kozawa Takahiro
The Institute Of Scientific And Industrial Research Osaka University
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Takei Satoshi
Nissan Chemical Inst. Ltd. Chiba Jpn
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Hijikata Hayato
The Institute Of Scientific And Industrial Research Osaka University
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Tagawa S
Osaka Univ. Osaka Jpn
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古沢 孝弘
Osaka University
著作論文
- Study of Self Cross-Link Bottom Antireflective Coating and Gap Fill Materials for Sublimate Defect Reduction in ArF Lithography
- Study of high etch rate bottom antireflective coating and gap fill materials using dextrin derivatives in ArF lithography
- Gap fill materials using cyclodextrin derivatives in ArF lithography
- Characterization of gap fill materials for planarizing substrate in via-first dual damascene lithography process
- Bottom Extreme-Ultraviolet-Sensitive Coating for Evaluation of the Absorption Coefficient of Ultrathin Film
- Step and Flash Nano Imprint Lithography of 80 nm Dense Line Pattern Using Trehalose Derivative Resist Material
- Ultraviolet Nano Imprint Lithography Using Fluorinated Silicon-Based Resist Materials