Shinjo Tetsuya | Nissan Chemical Industries Ltd. Toyama Jpn
スポンサーリンク
概要
関連著者
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Takei Satoshi
Nissan Chemical Ind. Ltd. Toyama Jpn
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Shinjo Tetsuya
Nissan Chemical Industries Ltd. Toyama Jpn
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TAKEI Satoshi
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
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SHINJO Tetsuya
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
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SAKAIDA Yasushi
Electronic Materials Research Laboratories, Nissan Chemical Industries, Ltd.
著作論文
- Study of Self Cross-Link Bottom Antireflective Coating and Gap Fill Materials for Sublimate Defect Reduction in ArF Lithography
- Study of high etch rate bottom antireflective coating and gap fill materials using dextrin derivatives in ArF lithography