Direct Growth of AlN Single Crystal on Sapphire by Solution Growth Method
スポンサーリンク
概要
- 論文の詳細を見る
AlN was directly grown on a sapphire substrate by the solution growth method with the Cu--Si--Al--Ti solvent under a nitrogen gas flow. X-ray diffraction measurements revealed that the grown AlN was single crystal. The AlN layer was epitaxially formed on the sapphire substrate with the orientation relationships: (0001)_{\text{AlN}} \parallel (0001)_{\text{sapphire}} and [\bar{1}100]_{\text{AlN}} \parallel [11\bar{2}0]_{\text{sapphire}}. The full widths at half maximum (FWHMs) of X-ray rocking curves for tilt and twist components were 414 and 2031 arcsec, respectively.
- 2013-08-25
著者
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Ujihara Toru
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Matsubara Hiroaki
Department Of Bioscience National Cardiovascular Center Research Institute
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Harada Shunta
Department of Materials Science and Engineering, Kyoto University
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Matsubara Hiroaki
Department of Materials Science and Engineering, Nagoya University, Nagoya 464-8603, Japan
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Mizuno Kohei
Department of Materials Science and Engineering, Nagoya University, Nagoya 464-8603, Japan
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Takeuchi Yukihisa
Department of Materials Science and Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kitou Yasuo
DENSO Corporation Research Laboratories, Nisshin, Aichi 470-0111, Japan
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Okuno Eiichi
DENSO Corporation Research Laboratories, Nisshin, Aichi 470-0111, Japan
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