Optimization of Anomalous Cells with High SET Resistance in Phase Change Memory Arrays
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概要
- 論文の詳細を見る
The resistance distribution in the crystalline (SET) state of phase change memory (PCM) is experimentally investigated at the array level using an 8 Mbit test chip. The SET distribution shows a high resistance tail, which potentially affects the reading margin of the chip. To further understand the anomalous behaviors of these tail cells, the SET resistances are characterized in terms of the programming pulse current magnitude and duration. These tail cells are probably caused by incomplete crystallization of the inactive region of phase change material. Finally, an optimization approach of applying a direct current of 0.6 mA to these tail cells is proposed and experimentally verified.
- 2013-01-25
著者
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Liu Bo
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Song Zhitang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Song Zhitang
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chinese Academy of Science
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Xu Linhai
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Chen Xiaogang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Chen Yifeng
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Chen Houpeng
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Yang Zuoya
United Lab, Semiconductor Manufacturing International Corporation, Shanghai 201203, China
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Wu Guanping
United Lab, Semiconductor Manufacturing International Corporation, Shanghai 201203, China
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Cai Daolin
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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Feng Gaoming
United Lab, Semiconductor Manufacturing International Corporation, Shanghai 201203, China
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Li Ying
United Lab, Semiconductor Manufacturing International Corporation, Shanghai 201203, China
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