Phase Change Memory Based on (Sb2Te3)0.85--(HfO2)0.15 Composite Film
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概要
- 論文の詳細を見る
The phase change characteristics of an (Sb2Te3)0.85--(HfO2)0.15 composite film were investigated by X-ray diffraction patterns, X-ray photoelectron spectroscopy, and resistance measurements. It is shown that the incorporation of HfO2 could improve the archival life stability of amorphous Sb2Te3 film, as evidenced by the increased crystallization temperature ranging from 200 to 250 °C. The required dissipated energy of (Sb2Te3)0.85--(HfO2)0.15-based device was calculated to be around $2.0\times 10^{-11}$ J, which was one order of magnitude smaller than that of Ge2Sb2Te5-based one. The endurance exceeded $2.2\times 10^{5}$ SET--RESET cycles and resistance ratio between RESET and SET state arrived two orders of magnitude.
- Japan Society of Applied Physicsの論文
- 2010-11-25
著者
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Zheng Hao
State Key Laboratory of Biotherapy and Cancer Center, West China Hospital, West China Medical School
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Yin Weijun
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Feng Songlin
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Song Zhitang
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Yao Dongning
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Zheng Hao
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Xi Wei
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Lu Yegang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai
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Song Sannian
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai
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Lu Yegang
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Song Sannian
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Song Zhitang
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Song Zhitang
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Feng Songlin
State Key Laboratory Of Functional Materials For Informatics Laboratory Of Nanotechnology Shanghai I
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Song Zhitang
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chinese Academy of Science
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