Study on Interface Adhesion between Phase Change Material Film and SiO<sub>2</sub> Layer by Nanoscratch Test
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概要
- 論文の詳細を見る
Temperature dependent interfacial adhesion strength between phase change material film and a SiO<sub>2</sub> layer was investigated employing Nano Indenter®. Phase change materials of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> and Si<sub>2</sub>Sb<sub>2</sub>Te<sub>6</sub> were adopted for a comparative study. The decrease of adhesive strength with an increased annealing temperature can be deduced from the optical micrographs of the two cases. Critical load obtained from the nanoscratch tests was introduced to quantitative characterize the interfacial adhesion strength of the samples. Scanning electron microscope and energy dispersive spectrometer were utilized to further analysis the adhesive properties of the interfaces. Results show that Si<sub>2</sub>Sb<sub>2</sub>Te<sub>6</sub> has better adhesive performance than Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> with SiO<sub>2</sub> due to its higher activation energy and weaker thickness variation upon crystallization as well as its smaller crystal grain size in the crystalline state. Considering the adhesive strength with SiO<sub>2</sub>, Si<sub>2</sub>Sb<sub>2</sub>Te<sub>6</sub> is a preferable candidate over Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> for future high density phase change random access memory application.
- 2011-09-25
著者
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Liu Bo
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Rao Feng
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Zhou Xilin
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Wu Liangcai
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Feng Songlin
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Song Zhitang
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Ren Kun
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Ren Kun
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, People's Republic of China
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Peng Cheng
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Guo Xiaohui
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Rao Feng
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Feng Songlin
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Song Zhitang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Song Zhitang
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chinese Academy of Science
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Liu Bo
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Wu Liangcai
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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Zhou Xilin
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
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