A Study on Microstructure and Electrical Properties of Pb_<0.8>La_<0.1>Ca_<0.1>Ti_<0.975>O_3 Thin Films Prepared by Metal-Organic Decomposition
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概要
- 論文の詳細を見る
In this paper, Ca modified (Pb, La)TiO_3 (PLCT) films were deposited on Pt coated silicon substrates using metal-organic decomposition (MOD) process. The preferred orientations polycrystalline films were varied with heating treatment temperature. The PLCT films exhibit good ferroelectric and dielectric properties at room temperature. The large area PLCT thin films with (100) preferred orientation may be application for future non-volatile memory devices (NVFRAM's) and dynamic random access memories (DRAM's).
- 社団法人応用物理学会の論文
- 1999-11-15
著者
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Song Zhitang
State Key Laboratory Of Functional Materials For Informatics And Nanotechnology Laboratory Shanghai
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Song Zhitang
Laboratory Of Plasma Physical Chemistry Box 288 Dalian University Of Technology
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Lin Chenglu
State Key Laboratory Of Functional Material For Information Shanghai Institute Of Metallurgy Chinese
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Lin Chenglu
State Key Laboratory Of Functional Material For Informatics Shanghai Institute Of Microsystem And In
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FU Xiaorong
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chine
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ZENG Janming
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chine
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GONG Jianxian
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chine
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Fu Xiaorong
State Key Laboratory Of Functional Material For Information Shanghai Institute Of Metallurgy Chinese
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Zeng Janming
State Key Laboratory Of Functional Material For Information Shanghai Institute Of Metallurgy Chinese
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Gong Jianxian
State Key Laboratory Of Functional Material For Information Shanghai Institute Of Metallurgy Chinese
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Song Zhitang
State Key Laboratory of Functional Material for Information, Shanghai Institute of Metallurgy, Chinese Academy of Science
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