Fabrication of Direct Silicon Bonded Hybrid Orientation Substrate by Separation by Implanted Oxygen Layer Transfer and Oxide Dissolution Annealing

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概要

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2011-03-25

著者

Wang Xi
State Key Laboratory of Coal Combustion, Huazhong University of Science and Technology
Lin Chenglu
State Key Laboratory Of Functional Material For Informatics Shanghai Institute Of Microsystem And In
WEI Xing
State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and I
XUE Zhongying
State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and I
WU Aimin
State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and I
CAO Gongbai
Shanghai Simgui Technology Co., Ltd.
ZHANG Bo
State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and I
ZHANG Miao
State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and I
Wang Xi
State Key Laboratory Of Coal Combustion Huazhong University Of Science And Technology
Zhang Bo
State Key Laboratory Of Functional Material For Informatics Shanghai Institute Of Microsystem And In
Wang Xi
State Key Laboratory Of Functional Material For Informatics Shanghai Institute Of Microsystem And In

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