Evaluation of Absolute Flux of Vacuum Ultraviolet Photons in an Electron Cyclotron Resonance Hydrogen Plasma: Comparison with Ion Flux
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概要
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We compared the absolute flux of positive ions with the flux of photons in a vacuum ultraviolet (VUV) wavelength range in an electron cyclotron resonance hydrogen plasma. The absolute flux of positive ions was measured using a Langmuir probe. The absolute flux of VUV photons was evaluated on the basis of the branching ratio between the Lyman and Balmer lines emitted from electronic states with the same principal quantum numbers. The absolute intensities of the Balmer lines were obtained by calibrating the sensitivity of the spectroscopic system using a tungsten standard lamp. It has been found that the flux of VUV photons is, at least, on the comparable order of magnitude with the positive ion flux, suggesting the importance of VUV photons in plasma-induced damage in fabrication processes of ultralarge-scale integrated circuits.
- 2012-08-25
著者
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Kurihara Kazuaki
Research And Development Center Toshiba Corporation
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Sasaki Koichi
Division Of Quantum Science And Engineering Faculty Of Engineering Hokkaido University
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Kurihara Kazuaki
Research and Development Center, Toshiba Corporation, Yokohama 235-8522, Japan
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Sasaki Koichi
Division of Quantum Science and Engineering, Faculty of Engineering, Hokkaido University, Sapporo 060-8628, Japan
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Zaima Kazunori
Department of Quantum Science and Engineering, Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan
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