Estimations of Electron Temperature and Electron Density in Argon-Containing Reactive Plasma Based on Diode Laser Absorption Spectroscopy
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概要
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We propose an optical method for estimating both the electron temperature and the electron density in an argon-containing reactive plasma. This method is based on density measurements of the two metastable states of argon in the plasma. Diode laser absorption spectroscopy is utilized for measuring the metastable densities. A population-kinetics model is used for finding the electron temperature and the electron density for which the measured densities of the metastable states are realized. This method has a potential application for the <i>in-situ</i> monitoring of plasma processing tools in factories because of the low cost, small footprint, and maintenance-free operation of a diode laser. We demonstrated this method in an inductively coupled Ar/N<sub>2</sub> mixture plasma.
- 2011-08-25
著者
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Sasaki Koichi
Division Of Quantum Science And Engineering Faculty Of Engineering Hokkaido University
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Asaoka Ryota
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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