Effective Species in Inductively Coupled Nitrogen Plasma for Silicon Nitriding
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概要
- 論文の詳細を見る
- 2011-08-25
著者
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Kurihara Kazuaki
Research And Development Center Toshiba Corporation
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Horikawa Yoshimine
Division Of Quantum Science And Engineering Graduate School Of Engineering Hokkaido University
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SASAKI Koichi
Division of Quantum Science and Engineering, Faculty of Engineering, Hokkaido University
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Sasaki Koichi
Division Of Quantum Science And Engineering Faculty Of Engineering Hokkaido University
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Kurihara Kazuaki
Research and Development Center, Toshiba Corporation
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