Analysis of Hundreds of Time Constant Ratios and Amplitudes of Random Telegraph Signal with Very Large Scale Array Test Pattern
スポンサーリンク
概要
- 論文の詳細を見る
Random telegraph signal (RTS) noise shows discrete and stochastic switching in two or more states at a drain current or threshold voltage. The capture and emission of carriers in individual traps near a silicon–gate insulator film interface induce RTS noise phenomena. RTS noise has become a crucial problem in analog devices and other devices. To suppress RTS noise, it is necessary to determine the energy level of traps. Time constant ratio has a strong relationship with the energy level of traps in gate insulator films. In this paper, we extract a large number of RTS data sets with large-scale array test patterns and evaluate the gate-bias voltage dependences of time constant ratio and amplitude. We demonstrate that the energy level of traps distributes uniformly at a drain current of at least 0.1–1.0 μA.
- 2010-04-25
著者
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Abe Kenichi
Graduate School Of Engineering Tohoku University
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Fujisawa Takafumi
Graduate School Of Engineering Tohoku University
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Watabe Shunichi
Graduate School Of Engineering Tohoku University
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Takafumi Fujisawa
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Naoto Miyamoto
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Akinobu Teramoto
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Shigetoshi Sugawa
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Tadahiro Ohmi
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Akinobu Teramoto
New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Tadahiro Ohmi
New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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