Super Low Velocity/Piezoelectric Substrate Structure with High Reflections and Applications for Surface Acoustic Wave Wide Band Resonators and Low-Loss Unidirectional Transducer Filters

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In this paper, the propagation characteristics and reflectivities of TeO2 grating/128° $Y$–$X$ LiNbO3, 36° $Y$–$X$ LiTaO3, and 5° $Y$–$X$ LiNbO3 are analyzed and applied to resonators and, conventional and dispersive unidirectional transducers. Theoretical results of thin film gratings show the large impedance ratio, for example, thin film grating shows $r=0.96$ at a thickness of $H/\lambda=0.01$, for 128° $Y$–$X$ LiNbO3. The experimental results for an interdigital transducer (IDT) resonator of thin film/Al/128° $Y$–$X$ LiNbO3 with $N=100,W=20\lambda,H/\lambda=0.01$ show an admittance of 1.0 S. The experimental unidirectional transducer filter using thin film TeO2 ($H/\lambda=0.015$)/Al/128° $Y$–$X$ LiNbO3 show a 1.6 dB insertion loss at 500 MHz without matching. Moreover filters with the phase linear, flat wide band, and low loss characteristics are developed using dispersive unidirectional IDT.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-07-30