Low-Loss Wide-Band Floating Electrode Type Unidirectional Transducer Filters and Ladder-Type Resonator Filters Using High-Temperature-Stable High Electromechanical Coupling Surface Acoustic Wave Substrates

概要

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The important properties required for surface acoustic wave (SAW) substrates are large electromechanical coupling coefficients ($k^{2}$), small temperature coefficient of frequency (TCF), low propagation loss, among other. LiNbO3 is a good SAW substrate because of its good properties and large size. We developed SiO2/rotated Y-cut, X-propagating LiNbO3 leaky SAW substrates with a large $k^{2}$ (over 0.2) and zero TCF at a small thickness of SiO2 of $H/\lambda=0.2$ ($H$: SiO2 film thickness, $\lambda$: SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. In this paper, the theoretical and experimental results for SAW filters, resonators and resonator filters are described. The low-loss filters using floating electrode type unidirectional transducer (FEUDT) showed an insertion loss of below 1 dB at a center frequency of 400 MHz and bandwidth of 20 MHz. Also, the resonator showed the wide-band characteristics and resonator filters showed a bandwidth of 80 MHz at a center frequency of 500 MHz.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-05-15