Characteristics of Radio-Frequency Microelectromechanical-System Switches for Communication Systems
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概要
- 論文の詳細を見る
The static and modal characteristics of capacitive-coupling membrane-type radio-frequency (RF) microelectromechanical-system (MEMS) switches are comprehensively investigated by the finite element method. Static characteristics including displacement, stress, effective stiffness constant, and actuation voltage, and modal characteristics such as natural frequency and switching time are studied. The structures and the materials of the switches are the main factors that determine switch performance. The study focuses on how the static and modal characteristics of the RF MEMS switches are affected by their structures and materials.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2007-04-30
著者
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Lai Yeong-lin
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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Lai Yeong-Lin
Department of Mechatronics Engineering, National Changhua University of Education, Changhua 50007, Taiwan, R.O.C.
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Chen Yueh-Hung
Graduate Institute of Display Technology, National Changhua University of Education, Changhua 50007, Taiwan, R.O.C.
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- Publisher's Note: "Characteristics of Radio-Frequency Microelectromechanical-System Switches for Communication Systems"
- Characteristics of Radio-Frequency Microelectromechanical-System Switches for Communication Systems