Fabrication of Photonic Crystals Using Nanoimprint Lithography
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Lai Yeong-lin
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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Chiu Chi-cheng
Department Of Mechatronics Engineering National Changhua University Of Education
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- Novel I-Line Phase Shift Mask Technique for Submicron T-Shaped Gate Formation
- Fabrication of Photonic Crystals Using Nanoimprint Lithography
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