Effects of Modified Precursor Solution on Microstructure of (Y,Yb)MnO3/HfO2/Si
スポンサーリンク
概要
- 論文の詳細を見る
Ferroelectric/insulator/silicon structures were prepared using (Y,Yb)MnO3 films as ferroelectrics and HfO2 thin films as insulators through alkoxy-derived precursor solutions. The HfO2 solution was chemically modified in order to decrease the number of heating cycles required. The HfO2 films prepared using a partially hydrolyzed alkoxide solution had a uniform structure. From the results of measurements of the roughness level and refractive index of the HfO2 films, the partial hydrolysis of the HfO2 solution was found to be effective for the formation of a uniform microstructure in a thin insulator film. (Y,Yb)MnO3/HfO2/Si structures were constructed using the resultant HfO2 thin films prepared using the modified solutions.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-10-30
著者
-
SUZUKI Kazuyuki
National Institute of Advanced Industrial Science and Technology
-
Kato Kazumi
National Industrial Research Institute Of Nagoya
-
Suzuki Kazuyuki
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
関連論文
- Synthesis of highly conductive and transparent ZnO nanowhisker films using aqueous solution(Global Innovation in Advanced Ceramics)
- Control of crystal growth of ZnO nanowhiskers in aqueous solution and synthesis of transparent nanoarrays (特集 自然に学ぶプロセス)
- Low-temperature fabrication of semi-circular shaped ZnO nanowhiskers using an aqueous solution (特集 自然に学ぶプロセス)
- Piezoelectric Properties of CaBi_4Ti_40_ Ferroelectric Thin Films Investigated by Atomic Force Microscopy
- Ferroelectric Property of Alkoxy-Derived YMnO_3 Films Crystallized in Argon
- Chemical Approach Using Tailored Liquid Sources for Traditional and Novel Ferroelectric Thin Films
- Local Piezoelectric Response in Bismuth-Based Ferroelectric Thin Films Investigated by Scanning Force Microscopy : Electnical Properties of Condensed Malter
- Structure and Ferroelectric Properties of Alkoxy-Derived Ca_2Bi_4Ti_5O_ Thin Films on Pt(111)/TiO_x/SiO_2/Si(100)
- Investigation of Domain Switching and Retention in Oriented PbZr_Ti_O_3 Thin Film by Scanning Force Microscopy
- Comparison of Microstructure and Ferroelectric Properties of Alkoxy-Derived MBi_4Ti_4O_ (M: Ca or Sr) Thin Films
- Preparation of Layer-Structured CaBi_2Ta_2O_9 Ferroelectric Thin Films through a Triple Alkoxide Route
- Multi-bit Programming for 1T-FeRAM by Local Polarization Method
- Synthesis of nanocrystal assembled TiO_2 particles by boric acid free liquid phase crystal deposition(Global Innovation in Advanced Ceramics)
- Micropore size distribution in nanocrystal assembled TiO_2 particles(Global Innovation in Advanced Ceramics)
- Synthesis and phase transformation of TiO_2 nano-crystals in aqueous solutions(Aqueous Solution Science for Ceramic Processing II)
- Aqueous solution synthesis of anatase TiO2 particles (特集 自然に学ぶプロセス)
- Characterization of Dielectric Nanocubes Ordered Structures Fabricated by Solution Self-Assembly Process
- Two-Dimensional Patterning of Inorganic Particles in Resin Using Ultrasound-Induced Plate Vibration
- Effects of Sonication Conditions on Ultrasonic Dispersion of Inorganic Particles in Acrylic Resin
- Characteristics of BaTiO3 Particles Sonochemically Synthesized in Aqueous Solution
- Evolution of Ferroelectric Structure in SrBi_2Ta_2O_9 Thin Films Prepared Using Triple Alkoxides on Pt-Passivated Si
- Low-Temperature Processing Using Triple Alkoxides Precursors for Non-volatile Ferroelectric Memories
- Effects of Flat HfO2 Films Derived from Diethanolamine Solution on Structure and Properties of Metal/Ferroelectrics/Insulator/Semiconductor
- Organic Thin-Film Transistors with Tailored Liquid Sources of High-$\kappa$ HfO2 Using Excimer Laser Irradiation
- Fabrication and Characterization of Dielectric Nanocube Self-Assembled Structures
- Anisotropic Crystal Growth and Microstructure Observation of Single Phase SnO_2 Nano-sheet Assemblies
- Preparation of ferroelectric (Y, Yb)MnO_3 films by chemical solution process
- Effects of Modified Precursor Solution on Microstructure of (Y,Yb)MnO3/HfO2/Si
- Ferroelectric Property of Alkoxy-Derived YMnO3 Films Crystallized in Argon
- Downsizing of HfO2 Layer for Pt/(Y,Yb)MnO3/HfO2/Si Structure
- Preparation of (Y,Yb)MnO3/Y2O3/Si (MFIS) Structure by Chemical Solution Deposition Method
- Thickness Dependence of Electrical Properties of Highly (100)-Oriented BaTiO3 Thin Films Prepared by One-Step Chemical Solution Deposition
- Piezoelectric Properties of CaBi4Ti4O15 Ferroelectric Thin Films Investigated by Atomic Force Microscopy
- S22. Numerical simulations of aggregation of sonochemically synthesized BaTiO_3 nanocrystals(Oral Presentation)