Conversion Characteristics of the Shear Wave Transducer Made of Unidirectionally Aligned ZnO Film in Plane
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概要
- 論文の詳細を見る
Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite $c$-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by $S_{11}$ analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-05-15
著者
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Matsukawa Mami
Faculty Of Engineering Doshisha University
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Yanagitani Takahiko
Faculty Of Engineering Doshisha University
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Watanabe Yoshiaki
Faculty Of Engineering Doshisha University
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Nohara Takuya
Faculty of Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0321, Japan
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Yanagitani Takahiko
Faculty of Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0321, Japan
-
Matsukawa Mami
Faculty of Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0321, Japan
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