Characterization of ($11\bar{2}0$) Textured ZnO Films Fabricated by RF Magnetron Sputtering

概要

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Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the $c$-axes of crystallites unidirectionally aligned in the substrate plane {($11\bar{2}0$) textured film}. The other is a film with $c$-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of $c$-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering method. The ($11\bar{2}0$) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.
2004-05-15