P1-16 Characteristics of shear mode FBAR using (112^^-0) textured ZnO films(Poster session 1)
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概要
- 論文の詳細を見る
- 2006-11-15
著者
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Matsukawa Mami
Faculty Of Engineering Doshisha University
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Yanagitani Takahiko
AIST
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Kiuchi Masato
National Inst. Advanced Industrial Sci. And Technol. Osaka Jpn
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WATANABE Yoshiaki
Faculty of Engineering, Doshisha University
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Kiuchi Masato
Aist
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Yanagitani Takahiko
Faculty of Engineering, Doshisha University
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Yanagitani Takahiko
Faculty Of Engineering Doshisha University
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Watanabe Yoshiaki
Faculty Of Engineering Doshisha University
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