Electrical and Interfacial Properties of Nonalloyed Ti/Au Ohmic and Pt Schottky Contacts on Zn-Terminated ZnO
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概要
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We report on the electrical and interfacial properties of nonalloyed Ti/Au ohmic and Pt Schottky contacts on Zn-terminated n-ZnO ($1.5\times 10^{17}$ cm-3). Nonalloyed Ti/Au and Pt contacts on the Zn-terminated ZnO respectively exhibit ohmic and Schottky behavior owing to different work functions and out-diffusion characteristics. The nonalloyed Ti/Au contact reveals very linear current–voltage behavior with a specific contact resistivity of $2.2\times 10^{-5}$ $\Omega$ cm2. However, Pt contact shows Schottky behavior with Schottky barrier heights (SBHs) of 0.62 eV and 0.78 eV, obtained from current–voltage ($I$–$V$) and capacitance–voltage ($C$–$V$) measurements, respectively. Using Auger electron spectroscopy (AES), we correlated the electrical properties of the nonalloyed Ti/Au ohmic and Pt Schottky contacts with the properties of the interface between the metal and ZnO.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-15
著者
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Kim Sang-ho
Department Of Chemistry And Biochmistry University Of California
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Ji Seung
Department Of Advanced Technology Fusion Konkuk University
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Lee Kwang
Department Of Bioengineering Yonsei University
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Yoon Young
Department Of Advanced Technology Fusion Konkuk University
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Kim Sang-Woo
School of Advanced Materials and Systems Engineering, Kumoh National Institute Technology (KIT), 1 Yangho-dong, Gumi, Gyeongbuk 730-701, Korea
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Kim Sang-Woo
School of Advanced Materials and System Engineering, Kumoh National Institute of Technology, Gumi, Gyeongbuk 730-701, Korea
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Kim Han-Ki
School of Advanced Materials and Systems Engineering, Kumoh National Institute Technology (KIT), 1 Yangho-dong, Gumi, Gyeongbuk 730-701, Korea
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Yang Beelyong
School of Advanced Materials and Systems Engineering, Kumoh National Institute Technology (KIT), 1 Yangho-dong, Gumi, Gyeongbuk 730-701, Korea
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Ji Seung
Department of Advanced Technology Fusion (DATF), Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, Korea
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Lee Kwang
Department of Advanced Technology Fusion (DATF), Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, Korea
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Kim Sang-Ho
Department of Materials Science and Engineering, Gwangju Institute of Science and Technolgoy, Gwangju 500-712, Korea
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Yoon Young
Department of Advanced Technology Fusion (DATF), Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, Korea
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