Electrical and Optical Properties of Amorphous BaTi0_3 Thin Films Grown by Metalorganic Chemical Vapor Deposition on Indium Tin Oxide-Coated Glass
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概要
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In order to fabricate insulating films for a full-color thin-film electroluminescent display, an amorphous BaTi0_3 thin film was deposited on an indium tin oxide-coated soda lime glass substrate at a low substrate temperature by metalorganic chemical vapor deposition with use of Ba(tmhd)_2, Ti(OC_3H_7)_4 and N_20. Scanning electron microscopy of the tilted surface of the as-grown BaTiO3 film showed a surface morphology of granular-like micrograins without defects such as pinholes and clusters. The thickness of the as-deposited film was approximate-ly 1400 A as confirmed by cross-sectional transmission electron microscopy. The formation of an interface film be-tween the as-grown film and the indium tin oxide was not observed. Room-temperature frequency dependence of capacitance and dissipation factor was clearly indicated those typically exhibited by the amorphous BaTiO_3 capacitor deposited on the conducting substrates having a metal-insulator-metal (MIM) structure. Optical transmittance measurements showed that the amorphous BaTi0_3 film deposited at 4OO℃ on the indium tin oxide-coated glass substrate has the transparency of about 80% in the visible wavelength range. Furthermore, the value of the optical band gap was approximately 4.71 eV. These results indicate that the amorphous BaTi0_3 thin film grown on the indium tin oxide-coated glass can be used for thin-film flat panel electroluminescent display applications.
- 社団法人応用物理学会の論文
- 1994-12-15
著者
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Yoon Young
Department Of Nuclear Engineering Korea Advanced Institute Of Science And Technology
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Yoon Young
Department Of Nuclear Engineering Korea Advanced Institute Of Science And Technology:(present Addres
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Yom Sang
Applied Physics Laboratory Korea Institute Of Science And Technology
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Yoon Young
Department Of Advanced Technology Fusion Konkuk University
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Yoon Young
Department of Advanced Technology Fusion (DATF), Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, Korea
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