Characteristics of Pb(Zr_<0.53>Ti_<0.47>O_3 Films Deposited by Metalorganic Decomposition on Pt/Ti/TiO_2/polysilicon/Si_3N_4/Si for Pizoelectric Microelectromechanical System Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-15
著者
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Kim Joon
The Institute Of Scientific And Industrial Research Osaka University
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Yoon Young
Department of Electrical & Electronic Engineering, Yonsei University
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Kim Jae
Photonics Research Center Korea Institute Of Science And Technology
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KIM Joon
Department of Preventive Medicine, College of Medicine, Dong-A University
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Kim Ji
Department Of Materials Engineering Sungkyunkwan University
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Kim J
Photonics Research Center Korea Institute Of Science And Technology
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POLLA Dennis
Department of Electrical Engineering, University of Minnesota
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Yoon Y
Inha Univ. Inchon Kor
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Kim J
Photonic Research Center Korea Institute Of Science And Technology
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Kim Joon
Department Of Pathology Inha Research Institute For Medical Science
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Yoon Young
Department Of Advanced Technology Fusion Konkuk University
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Polla Dennis
Department Of Electrical Engineering University Of Minnesota
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Kim Joon
Department Of Ophthalmology Kangbuk Samsung Hospital Sungkyunkwan University School Of Medicine
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Kim Joon
Department of Applied Chemistry, College of Engineering, Seoul National University
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Yoon Young
Department of Advanced Technology Fusion (DATF), Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, Korea
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