Improvement of Permeation of Solvent-Free Multilayer Encapsulation of Thin Films on Poly(ethylene terephthalate)
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概要
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In this study, inorganic multilayer thin-film encapsulation is adopted for the first time to protect an organic layer from moisture and oxygen. Inorganic multilayer thin-film encapsulation is deposited onto poly(ethylene terephthalate) (PET) using an electron beam and sputtering. The SiON/SiO2 and parylene layer show the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from a level of 0.57 g m-2 day-1 (bare substrate) to $1\times 10^{-5}$ g m-2 day-1 after the application of a SiON and SiO2 layer. These results indicate that PET/parylene/SiO2/SiON barrier coatings have high potential for flexible organic light-emitting diode (OLED) applications.
- 2006-12-15
著者
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Seo Dae-shik
Department Of Electrical & Computer Engineering College Of Engineering Yonsei University
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Kang Hee-jin
Department Of Electrical And Electronic Engineering Yonsei University
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Han Jin-Woo
Department of Electrical and Electronic Engineering (C-724), College of Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul 120-749, Korea
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Kim Jong-Yeon
Department of Electrical and Electronic Engineering, College of Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul 120-749, Korea
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Kim Gwi-Yeol
Department of Mechatronics Engineering, Korea University of Technology and Education, Chunnam 330-708, Korea
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