Improving the Accuracy of Modified Shift-and-Ratio Channel Length Extraction Method Using Scanning Capacitance Microscopy
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概要
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A modified shift-and-ratio (MS&R) method of extracting the effective channel length ($L_{\text{eff}}$) has been tested on metal oxide semiconductor (MOS) transistors fabricated by state-of-the-art CMOS technology. The value of $L_{\text{eff}}$ generated by this method is more reasonable than the original shift-and-ratio method with much less computation time involved. We show the correctness of the MS&R method by comparing the $L_{\text{eff}}$ extracted with the channel length obtained by cross-sectional scanning capacitance microscopy (SCM) measurement. In addition, we show that a higher off current corresponds to a smaller $L_{\text{eff}}$ measured by our method.
- 2004-04-15
著者
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Lau Wai-shing
School Of Electrical And Electronic Engineering Nanyang Technological University
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Jiang Yao-yao
Institute Of Microelectronics
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LIM Vanissa
Institute of Microelectronics
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TRIGG Alastair
Institute of Microelectronics
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Vigar David
Department Of Technology Development Chartered Semiconductor Manufacturing Ltd
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Eng Chee-wee
School Of Electrical And Electronic Engineering Nanyang Technological University
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Tee Kheng-chok
Department Of Technology Development Chartered Semiconductor Manufacturing Ltd
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Chan Lap
Department Of Diagnostic Radiology Kwong Wah Hospital
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Eng Chee-Wee
School of Electrical and Electronic Engineering, Nanyang Technological University, Block S2, Nanyang Avenue, Singapore 639798, Republic of Singapore
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Jiang Yao-Yao
Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685, Republic of Singapore
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Chan Lap
Department of Technology Development, Chartered Semiconductor Manufacturing Ltd., 60 Woodlands Industrial Park D St. 2, Singapore 738406, Republic of Singapore
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Vigar David
Department of Technology Development, Chartered Semiconductor Manufacturing Ltd., 60 Woodlands Industrial Park D St. 2, Singapore 738406, Republic of Singapore
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Trigg Alastair
Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685, Republic of Singapore
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