Characterization of Polarization Switching Behavior of Pt/SrBi2Ta2O9/Pt Ferroelectric Capacitors in Ferroelectric Random Access Memory

概要

論文の詳細を見る
We investigated on the polarization switching behavior of Pt/SrBi2Ta2O9/Pt ferroelectric capacitors for ferroelectric random access memory (FeRAM). Apparent switching time of the ferroelectric capacitors, measured with ferroelectric tester, is composed with various parameters of measurement set-up, and is also a function of area of the ferroelectric capacitors. True switching time of the ferroelectric capacitor, which is obtained by removing the effect of the measurement set-up, is about 10 ns. However, it is not a limiting factor for realization of high-speed (${\sim}50$ ns) non-volatile FeRAM.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2002-02-15