Formation of Diamond Like Carbon by a Pure Carbon Arc Under High Vacuum
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概要
- 論文の詳細を見る
The arc discharge plasma of solid carbon has been applied to the formation of hard carbon thin films. A double-mesh electrode is placed at the exit of the sharply directed arc plasma column confined in the magnetic bottle. The radio frequency voltage applied to the electrode is effective to diverge the plasma column radially to form a uniform plasma in front of the substrate and also to remove macroparticles. The characteristics of the obtained film are examined using Raman spectra and other techniques.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-28
著者
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OKAZAKI Kiyohiko
The Institute of Physical and Chemical Research
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Tamba Moritake
The Institute Of Physical And Chemical Rerearch
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Kawamura Kazuhiko
Chubu Electric Power Co. Inc.
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Amemiya Hiroshi
The Institate Of Phyiscal Chemical Research
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Amemiya Hiroshi
The Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Kawamura Kazuhiko
Chubu Electric Power Co., Inc., Electrotechnology Applications R&D Center, Research & Development Bureau, 20-1, Kitasekiyama, Ohdaka, Midori, Nagoya 459-8522, Japan
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Tamba Moritake
The Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Okazaki Kiyohiko
The Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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