Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma : Short Note
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概要
- 論文の詳細を見る
The pressure and power dependences of the electron density have been measured in a parallel-plate RF discharge in Ar. It has been found that the density shows a maximum at a particular pressure and input power, indicating that there is an optimum condition for the absorption of RE power and its efficiency. A macroscopic model has been made using an equivalent circuit to explain the optimum condition for power absorption. A comparison of the experiment with the model is found to he useful for RE discharge apparatus design.
- 社団法人応用物理学会の論文
- 2002-07-15
著者
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Amemiya Hiroshi
The Institute Of Physical And Chemical Research
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Endo Masao
Faculty Of Engineering Chuo University
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IKEGAKI Hideki
Faculty of Engineering Chuo University
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TAJIMA Shinjiro
Faculty of Engineering Chuo University
-
Amemiya Hiroshi
The Institate Of Phyiscal Chemical Research
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