Measuring methods of Plasma Parameters by a Differentiating and Modulating Doublle Probe
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概要
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methods for the (1) determination of the electron temperature by differentiation of the probe curve, (2) detection of a non-Maxwellian energy distribution and plasma inhomogeneity, (3) rapid measurement of the electron temperature by voltage modulation, and (4) measurement of the space potential are developed.
- 社団法人応用物理学会の論文
- 1988-04-20
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