Electron Energy Distribution in Nitrogen Plasma in Various Discharges
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概要
- 論文の詳細を見る
Electron energy distribution in nitrogen plasma is studied to clarify the conditionof dip formation by the resonant vibrational excitation of N. in several types ofdischarges: in diffusion and glow plasmas in a glass tube, in a multipole minimum-Btype plasma, in diffusion and glow mode plasmas in a large volume space chamberand in an electron cyclotron resonance plasma. It is found that the dip appears whenthe mean energy of thermal electrons is in a range from 0.8 to a few eV. When themean energy is lower than 0.5 eV or higher than 8 eV, the dip is not detectable.Mechanism of the dip formation is discussed and the depth of the dip is comparedwith previous theoretical results.
- 社団法人日本物理学会の論文
- 1987-12-15
著者
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Amemiya Hiroshi
The Institute Of Physical And Chemical Research
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Teii S
Musashi Inst. Technol. Tokyo Jpn
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Teii Shinriki
Musashi Institute Of Technology
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Ono S
Musashi Inst. Technol. Tokyo Jpn
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ONO Shigeru
Musashi Institute of Technology
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Amemiya Hiroshi
The Institate Of Phyiscal Chemical Research
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