Capacitive Radio Frequency Discharge Plasma Containing Negative Ions
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概要
- 論文の詳細を見る
The parallel-plate IF discharge in oxygen has been investigated in the pressure between 10 'and l Torr. The discharge rnechanisrta is considered by conaparing the electron energy distribtttionf (71;) in Op and N2 discharges. In 02, the low energy part of f (E) becomes deficient; a broadpeak of thermal electrons appears to be shif'ted into the medium energy range; and the populationof a higher energy group of electrons conaing frorn the cathode sheath is less than that of N2discharge. These are related to the negative Jon fornaation in Ox. Negative ions in the dischargein 02 are measured not only by the probe but also by using the laser photodetachment technique,The restrlt of measurements have revealed that optiraaurn RF power and pressure to make thenegative ion density maxirnum exist while positive ions increases with the RF power.
- 社団法人日本物理学会の論文
- 1997-03-15
著者
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Yasuda Noboru
Atp Jpan Ltd
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Amemiya Hiroshi
The Institute Of Physics And Chemical Research (riken)
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Amemiya Hiroshi
The Institate Of Phyiscal Chemical Research
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