CW Metal Arc Discharge Under High Vacuum

概要

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A CW metal arc discharge ion source, which does not use a any trigger electrode operating under high vacuum, has been developed. For stable sustenance of the CW metal arc in the high-vacuum condition, an electrically floated metal cover is applied to the cathode. The experimental result shows that the metal arc is mainly governed by the rule that the product of the pressure and arc length should be constant. Using an electrically floated metal cover, a copper metal plasma has been produced by vacuum DC arc discharge at a pressure of about 8×10-6 Torr in a magnetic field above 3.2 kG. This paper describes the marked decrease in the resolution of a single focusing mass spectrometer caused by high ion temperature. A double focusing ion mass spectrometer is applied to obtain more detailed information on the multicharged ions. The data which show the charged state of iron ions at a pressure of about 4×10-6 Torr will be presented. In order to explain the mechanism of forming highly charged states, the variation of the space potential is considered.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
1997-07-15