Fabrication of High Quality Ni1-xPtx Films for Use as Materials in High-Sensitivity Temperature Sensor
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概要
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High-quality thin films of Ni1-xPtx alloys have been investigated as materials for temperature sensors with a high temperature coefficient of resistance (TCR). Since the high TCR of Ni has been attributed to the spin-disordered scattering occuring just below the Curie temperature ($T_{\text{C}}$), we considered that a higher TCR can be obtained by decreasing $T_{\text{C}}$ to be slightly greater than room temperature (RT) by alloying Ni with Pt. Ni1-xPtx alloy films have been prepared on different substrates by RF magnetron sputtering followed by annealing in high vacuum. TCRs as high as 10000 ppm/K at RT were obtained in the case of the Ni0.75Pt0.25 alloy film prepared on a SrTiO3 (STO) substrate. This TCR is 2.5 times higher than that of commonly available Pt temperature sensors.
- 2007-04-25
著者
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SATO Katsuaki
Department of Applied Physics, Tokyo University of Agriculture and Technology
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Ishibashi Takayuki
Department Of Applied Physics Faculty Of Technology Tokyo University Of Agriculture And Technology
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Morishita Yoshitaka
Department Of Applied Physics Tokyo University Of Agriculture And Technology
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Sato Yutaka
Department Of Biochemistry And Oral Health Science Center Tokyo Dental College
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Ishibashi Takayuki
Department of Applied Physics, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan
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Obara Keisuke
Yamatake Corporation, 1-12-2 Kawana, Fujisawa, Kanagawa 251-8522, Japan
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Ichida Shunji
Yamatake Corporation, 1-12-2 Kawana, Fujisawa, Kanagawa 251-8522, Japan
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Sato Yutaka
Department of Applied Physics, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan
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Sato Katsuaki
Department of Applied Physics, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan
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SATO Katsuaki
Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology
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