Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air
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概要
- 論文の詳細を見る
The deposition of diamond-like carbon (DLC) films at atmospheric pressure is a promising technique of achieving in-process coatings regardless of work size. In this study, we aimed at the synthesis of DLC films at atmospheric pressure by nanopulse chemical vapor deposition (CVD) using a unique power source system consisting of a static induction (SI) thyristor and an inductive energy strage (IES). Then, we realized the synthesis of DLC films in open air (101 kPa). The deposition rate was as high as 0.4 μm/min, and the hardness of the film was 20.6 GPa. From Raman spectroscopic analysis results, the quality of films was found to significantly depend on input voltage and deposition time.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2005-12-10
著者
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Ohtake Naoto
Department Of Anatomy Shinshu University School Of Medicine
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Kondo Yoshimasa
Department Of Internal Medicine Ena Municipal Hospital
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TERAZAWA Tatsuya
NGK Insulators
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Saito Takao
Ngk Insulators Ltd.
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Saito Masanori
Department Of Agricultural Chemistry The University Of Tokyo
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Kondo Yoshimasa
Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Terazawa Tatsuya
NGK Insulators, 2-56 Suda, Mizuho-ku, Nagoya 467-8530, Japan
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