B-12 Rapid Growth of Diamond-like Carbon Films by Nanopulse Magnetron Chemical Vapor Deposition(Session: Coatings/Thin Films)
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概要
- 論文の詳細を見る
Growth rate of DLC films were investigated using magnetic field enhanced nanopulse plasma chemical vapor deposition method. Maximum growth rate of DLC film by this magnetron CVD method is approximately fifty-fold larger than that of conventional plasma CVD method. High growth rate area of DLC film corresponds to the magnetic field distribution region that the field is parallel to the substrate 15 to 20 mm above the substrate.
- 一般社団法人日本機械学会の論文
- 2006-11-08
著者
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Saito Masanori
Department of Internal Medicine (III), Kanazawa University School of Medicine
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MURAKAMI Hiroya
Department of Surgery II, Nagoya University School of Medicine
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Ohtake Naoto
Nagoya Univ. Nagoya Jpn
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Saito Masanori
Department Of Internal Medicine (iii) Kanazawa University School Of Medicine
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Murakami Hiroya
Tokyo Inst. Of Technol. Tokyo Jpn
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Murakami Hiroya
Department Of Mechanical Sciences And Engineering Tokyo Institute Of Technology
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Murakami Hiroya
Department Of Mechanical Science And Engineering Tokyo Institute Of Technology
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Saito Takao
NGK INSULATORS, LTD.
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Kondo Yoshimasa
NGK INSULATORS, LTD.
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Kondo Yoshimasa
Ngk Insulators Ltd.
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Saito Masanori
Department Of Grassland Ecology National Institute Of Livestock And Grassland Science
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Saito Masanori
Department Of Mechanical Science And Engineering Tokyo Institute Of Technology
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Saito Takao
Ngk Insulators Ltd.
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Saito Masanori
Department Of Agricultural Chemistry The University Of Tokyo
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