Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives

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概要

• 論文の詳細を見る

• The parallel transition mode of the snap down of a fast-scanning mirror with vertical combdrives was analyzed. The snap down voltage of such a mirror significantly decreased when offsets between the ideal and actual upper movable comb teeth were more than 0.1 μm. When gap between the upper and lower comb teeth was decreased to increase torque, snap down voltage significantly decreased. The largest offset is induced by the lithography step in the fabrication process of the mirror. Self-alignment is required to increase the resonant frequency of the scanning mirror.

• Japan Society of Applied Physicsの論文
• 2004-02-15

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Lee Daesung

  Ginzton Laboratory Stanford University

• Krishnamoorthy Uma

  Ginzton Laboratory Stanford University

• Solgaard Olav

  Ginzton Laboratory Department Of Electrical Engineering Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

• Krishnamoorthy Uma

  Ginzton Laboratory, Stanford University, Stanford, California 94305, U.S.A.

• Wada Hiroyuki

  Ginzton Laboratory, Stanford University, Stanford, California 94305, U.S.A.

• Solgaard Olav

  Ginzton Laboratory, Stanford University, Stanford, California 94305, U.S.A.

• Zappe Stefan

  Ginzton Laboratory, Stanford University, Stanford, California 94305, U.S.A.

• Lee Daesung

  Ginzton Laboratory, Stanford University, Stanford, California 94305, U.S.A.

関連論文

• Reactive ECR-Sputter-Deposition of Ni-Zn ferrite thin-films for backlayer of PMR media
• Preparation of co-containing spinel ferrite / Ni-Zn ferrite thin-film double-layered perpendicular recording media using reactive ECR sputtering
• Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)
• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology
• Micro-optical Characterization of Fluidic Self-assembly of Drosophila Embryos through Surface Tension : Principle, Simulation and Experiments
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives

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