The Torque of High Speed Scanning Micromirrors with Vertical Combdrives

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概要

• 論文の詳細を見る

• 200 μm by 200 μm scanning micromirror actuated by vertical combdrives was fabricated. It is important to estimate the torque in order to know the tilt angle. We propose a way to estimate the torque by using the capacitance derived from the overlap area between the upper and lower comb teeth. The tilt angle that was estimated using the calculated torque was about 80% of the measured tilt.

• Japan Society of Applied Physicsの論文
• 2003-12-01

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Lee Daesung

  Ginzton Laboratory Stanford University

• Solgaard Olav

  Ginzton Laboratory Department Of Electrical Engineering Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

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