Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror

スポンサーリンク

概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-01-15

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Lee Daesung

  Ginzton Laboratory Stanford University

• WADA Hiroyuki

  Ginzton Laboratory, Stanford University

• SOLGAARD Olav

  Ginzton Laboratory, Stanford University

• KRISHNAMOORTHY Uma

  Ginzton Laboratory, Stanford University

関連論文

• Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)
• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives

スポンサーリンク