Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)

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概要

• 論文の詳細を見る

• The lithography process on the deep trench pattern above the large cavity is proposed to fabricate the MEMS structure. Generally ,bubbles generated on the trench patterns when it was baked after coating resist. The probability of the generation of bubbles was reduced by decreasing the backing rate. The fast scanning micromirror with 50.8kHz resonant frequency was fabricated by controlling the backing rate.

• 社団法人電子情報通信学会の論文
• 2004-08-01

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Wada Hirofumi

  Faculty Of Engineering Yamaguchi University

• Lee Daesung

  Ginzton Laboratory Stanford University

• SOLGAARD Olav

  Ginzton Laboratory, Stanford University

• WADA Hiroyuki

  Stanford University

• LEE Daesung

  Stanford University

• ZAPPE Stefan

  Stanford University

• KRISHNAMOORTHY Uma

  Stanford University

• SOLGAARD Olav

  Stanford University

• Solgaard Olav

  Ginzton Laboratory Stanford University

• Krishnamoorthy Uma

  Ginzton Laboratory Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

関連論文

• Reactive ECR-Sputter-Deposition of Ni-Zn ferrite thin-films for backlayer of PMR media
• Preparation of co-containing spinel ferrite / Ni-Zn ferrite thin-film double-layered perpendicular recording media using reactive ECR sputtering
• Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)
• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Analysis of the Structure of Vertical Combdrives of Fast Scanning Micromirrors

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