Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror

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概要

• 論文の詳細を見る

• A process using two silicon layers that were bonded to each other with no supporting structure to fabricate a micro electro mechanical systems (MEMS) device is proposed. A bridge structure to support the lower of two silicon layers during this bonding process was used. After bonding the two silicon layers, these supports were removed by a dry etching process. High speed scanning micromirrors with vertical combdrives were fabricated using this process.

• Japan Society of Applied Physicsの論文
• 2004-01-15

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Lee Daesung

  Ginzton Laboratory Stanford University

• Krishnamoorthy Uma

  Ginzton Laboratory Stanford University

• Solgaard Olav

  Ginzton Laboratory Department Of Electrical Engineering Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

関連論文

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• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology
• Micro-optical Characterization of Fluidic Self-assembly of Drosophila Embryos through Surface Tension : Principle, Simulation and Experiments
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives

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