Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)

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概要

• 論文の詳細を見る

• The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.

• 社団法人電子情報通信学会の論文
• 2004-11-01

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Wada Hirofumi

  Faculty Of Engineering Yamaguchi University

• Lee Daesung

  Ginzton Laboratory Stanford University

• WADA Hiroyuki

  Ginzton Laboratory, Stanford University

• SOLGAARD Olav

  Ginzton Laboratory, Stanford University

• Solgaard Olav

  Ginzton Laboratory Stanford University

• Solgaard Olav

  Ginzton Laboratory Department Of Electrical Engineering Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

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