Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-08-01

著者

• Zappe Stefan

  Ginzton Laboratory Stanford University

• Wada Hirofumi

  Faculty Of Engineering Yamaguchi University

• Lee Daesung

  Ginzton Laboratory Stanford University

• WADA Hiroyuki

  Ginzton Laboratory, Stanford University

• SOLGAARD Olav

  Ginzton Laboratory, Stanford University

• KRISHNAMOORTHY Uma

  Ginzton Laboratory, Stanford University

• SOLGAAD Olav

  Ginzton Laboratory, Stanford University

• Solgaard Olav

  Ginzton Laboratory Stanford University

• Krishnamoorthy Uma

  Ginzton Laboratory Stanford University

• Wada Hiroyuki

  Ginzton Laboratory Stanford University

関連論文

• Reactive ECR-Sputter-Deposition of Ni-Zn ferrite thin-films for backlayer of PMR media
• Preparation of co-containing spinel ferrite / Ni-Zn ferrite thin-film double-layered perpendicular recording media using reactive ECR sputtering
• Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)
• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives : Instrumentation, Measurement, and Fabrication Technology
• Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
• Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
• The Torque of High Speed Scanning Micromirrors with Vertical Combdrives

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