Analysis of the Structure of Vertical Combdrives of Fast Scanning Micromirrors

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概要

• 論文の詳細を見る

• The advantages of the fast scanning micromirror above vertical combdrives (bottom type) fabricated by the self-alignment process are reported. The fill factor of the bottom type was larger than that of a fast scanning micromirror beside vertical combdrives (side type) fabricated previously. The maximum tilt angle of the bottom type was larger than that of the side type. The probability of the failure mode at applied high voltage and the narrow gap between the upper and lower comb teeth (snap down) of the bottom type was lower than that of the side type. A bottom-type fast scanning micromirror the resonant frequency of which was 50.8 kHz was fabricated.

• Japan Society of Applied Physicsの論文
• 2004-04-15

著者

• WADA Hiroyuki

  Stanford University

• Wada Hiroyuki

  Stanford University, Ginzton Laboratory, Stanford, California 94305, U. S. A.

関連論文

• Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
• Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives : Structure and Mechanicall and Termal Properties of Condensed Matter
• Analysis of the Structure of Vertical Combdrives of Fast Scanning Micromirrors

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