Thermal Desorption Behavior of AlF3 Formed on Al2O3
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概要
- 論文の詳細を見る
Thermal desorption behaviors of the AlF3 layer formed on Al2O3 in the sample temperature range from $T_{\text{s}} = 300$ to 930 K have been studied using molecular beam mass spectrometry combined with a time-of-flight (TOF) technique. Fluorine atoms were detected as the desorbed species at sample temperatures of $T_{\text{s}} = 625$ to 850 K and the intensity was found to be peaked at $T_{\text{s}} = 750$ K. AlF2 species whose translational temperature $T_{\text{tr}}$ is approximately 100 K lower than $T_{\text{s}}$ were also detected as desorbed species above $T_{\text{s}} = 850$ K and the intensity increased exponentially as $T_{\text{s}}$ was raised. Based on these results, the desorption behavior of AlF3 species is discussed.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-06-15
著者
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Sakai Hiroaki
Materials Research Laboratory Ngk Insulators Ltd.
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Akiyama Keijiro
Department Of Molecular Design And Engineering Graduate School Of Engineering Nagoya University
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Sawabe Kyoichi
Department Of Molecular Design And Engineering Graduate School Of Engineering Nagoya University
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Watanabe Morimichi
Materials Research Laboratory Ngk Insulators Ltd.
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Ishikawa Takahiro
Materials Research Laboratory Ngk Insulators Ltd.
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Iida Takashi
Departmenr Of Neuropathology Neurological Institute Graduate School Of Medical Sciences Kyushu Unive
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Shobatake Kosuke
Department Of Functional Molecular Science The Graduate University For Advanced Studies And Institute For Molecular Science
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Shobatake Kosuke
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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Sawabe Kyoichi
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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Akiyama Keijiro
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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Iida Takashi
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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