Thermal Desorption Behavior of AIF_3 Formed on Al_2O_3
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-06-15
著者
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IIDA Takashi
Departments of Transplantation; School of Medicine, Tokai University
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Sakai Hiroaki
Materials Research Laboratory Ngk Insulators Ltd.
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WATANABE Morimichi
Materials Research Laboratory, NGK Insulators, Ltd.
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SAWABE Kyoichi
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University
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SHOBATAKE Kosuke
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University
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AKIYAMA Kenijiro
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University
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ISHIKAWA Takahiro
Materials Research Laboratory, NGK INSULATORS, LTD.
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